Electron Beam Evaporation (e-beam)
Descrição:
Angstrom Engineering's electron beam evaporator, model NexDep, is primarily used for the metallization of electrical contacts in devices. It contains a 6-position circular carousel and a 6 kW power source (from Telemark) capable of depositing almost any material. The system is able to reach vacuum levels of 2x10-6 Torr in 2 hours and deposit films on substrates up to 6". The entire system is computer controlled, and an on-the-fly thickness gauge (from Inficon) is used for accurate measurement of coating thickness.