The probe station from Cascade Microtech (now FormFactor, model EP6M) is equipped with 4 tips, triaxial cables, a microscope and a CCD camera. The setup sits inside a space-efficient design metal enclosure for measurements in the dark and with low noise. The semiconductor parameter analyzer from Agilent (now Keysight), model B1500A, allows measurements at room temperature of I-V (up to 1 fA) and C-V curves up to 200 V. Measurements are performed at room temperature on samples sizes up to 6”.