New e-beam deposition system at LNMS

A new electron-beam deposition system, model NEXDEP from Angstrom Engineering, fully automated (vacuum and deposition functions), having six 7cc pockets and a 6 kW power supply, was recently installed (May 15, 2013) in the New Semiconductor Materials Laboratory (LNMS) of the DFMT.  The system will be used to make Ni/Ge/Au ohmic contacts on quantum-well and quantum-dot-based optoelectronic devices like infrared photodetectors, solar cells and quantum-cascade lasers.

Desenvolvido por IFUSP