May
08
2014
By intranet
A new scanning probe microscope (SPM), model ICON from Bruker, was recently installed (March 19, 2013) at the New Semiconductor Materials Laboratory (LNMS) of the Solid-State Department (DFMT). The system is able to measure large wafers with a diameter up to 6", and is equiped with the atomic force, magnetic force, electrical force, scanning tunneling, and surface potential (Kelvin) modes.
